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[IEEE ESSCIRC 2004 - 29th European Solid-State Circuits Conference - Estoril, Portugal (16-18 Sept. 2003)] ESSCIRC 2004 - 29th European Solid-State Circuits Conference (IEEE Cat. No.03EX705) - Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit
Ylimaula, M., Aberg, M., Kiihamaki, J., Ronkainen, H.Year:
2003
Language:
english
Pages:
4
DOI:
10.1109/esscirc.2003.1257209
File:
PDF, 257 KB
english, 2003