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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Wet Chemical Etching of Wide Bandgap Semiconductors- GaN, ZnO and SiC
Pearton, Steve, Lim, W, Ren, Fan, Norton, DavidVolume:
6
Year:
2007
Language:
english
Pages:
12
DOI:
10.1149/1.2731219
File:
PDF, 390 KB
english, 2007