An Experimental and Theoretical Investigation of Dynamic Pull-In in MEMS Resonators Actuated Electrostatically
Alsaleem, F.M., Younis, M.I., Ruzziconi, L.Volume:
19
Year:
2010
Language:
english
Pages:
807
DOI:
10.1109/jmems.2010.2047846
File:
PDF, 1.70 MB
english, 2010