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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Electrostatic deflections of volume constrained MEMS
Pelesko, J.A., Goldsztein, G.Year:
2003
Language:
english
Pages:
5
DOI:
10.1109/icmens.2003.1221968
File:
PDF, 300 KB
english, 2003