[IEEE Oper. Center 2003 International Semiconductor Conference. CAS 2003 - Sinaia, Romania (28 Sept.-2 Oct. 2003)] 2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676) - Optimization of deep wet etching borosilicate glass substrates technological process for biomedical applications
Manea, E., Cernica, I., Lupu, M., Podaru, C.Year:
2003
Language:
english
Pages:
4
DOI:
10.1109/smicnd.2003.1251377
File:
PDF, 270 KB
english, 2003