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Temperature-compensated aluminum nitride lamb wave resonators
Chih-ming Lin, Ting-ta Yen, Yun-ju Lai, Felmetsger, V.V., Hopcroft, M.A., Kuypers, J.H., Pisano, A.P.Volume:
57
Year:
2010
Language:
english
Pages:
533
DOI:
10.1109/tuffc.2010.1443
File:
PDF, 1.27 MB
english, 2010