Titanium cluster polymers as reactive ion etch barriers

Chemistry of Materials 1995 Vol. 7; Iss. 8

Titanium cluster polymers as reactive ion etch barriers

Katz, H. E., Schilling, M. L., Stein, S. M., Houlihan, F. M., Hutton, R. S., Taylor, G. N.
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Volume:
7
Year:
1995
Language:
english
Pages:
5
DOI:
10.1021/cm00056a020
File:
PDF, 556 KB
english, 1995
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