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[IEEE 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 - Los Angeles, CA, USA (9-12 Sept. 1997)] 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 - [110] silicon etching for high aspect ratio comb structures
Seong-Hyok Kim,, Sang-Hun Lee,, Hyung-Taek Lim,, Yong-Kweon Kim,, Seung-Ki Lee,Year:
1997
Language:
english
Pages:
5
DOI:
10.1109/etfa.1997.616277
File:
PDF, 803 KB
english, 1997