Properties of Si[sub x]O[sub y]N[sub z] Films on Si
Brown, D. M., Gray, P. V., Heumann, F. K., Philipp, H. R., Taft, E. A.Volume:
115
Year:
1968
Language:
english
DOI:
10.1149/1.2411151
File:
PDF, 795 KB
english, 1968