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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California (Sunday 1 August 2010)] Advances in X-Ray/EUV Optics and Components V - DLC/Si multilayer mirrors for EUV radiation
Gawlitza, Peter, Braun, Stefan, Leson, Andreas, Soer, Wouter, Jak, Martin, Banine, Vadim, Khounsary, Ali M., Morawe, Christian, Goto, ShunjiVolume:
7802
Year:
2010
Language:
english
Pages:
1
DOI:
10.1117/12.861165
File:
PDF, 1.70 MB
english, 2010