[IEEE Electronics (PrimeAsia) - Macao, China (2011.10.6-2011.10.7)] 2011 Asia Pacific Conference on Postgraduate Research in Microelectronics & Electronics - Electromechanical closed-loop with high-Q capacitive micro-accelerometers and pulse width modulation force feedback
Ye, Zhen-hua, Yang, Hai-gang, Liu, Fei, Yin, Tao, Wu, Qi-songYear:
2011
Language:
english
Pages:
4
DOI:
10.1109/primeasia.2011.6075068
File:
PDF, 2.02 MB
english, 2011