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Sub-60 nm Periodic Grating Feature Patterning by Immersion Based 364 nm Laser Interference
Sidharthan, R., Murukeshan, V. M., Sathiyamoorthy, K.Volume:
12
Language:
english
Pages:
4
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2012.6453
Date:
August, 2012
File:
PDF, 1.50 MB
english, 2012