MEMS electrostatic energy harvesters with end-stop effects
Le, Cuong Phu, Halvorsen, EinarVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/7/074013
Date:
July, 2012
File:
PDF, 1.71 MB
english, 2012