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[IEEE 2011 IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2011) - Phoenix, AZ (2011.01.17-2011.01.19)] 2011 IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems - Design and fabrication considerations in developing high-Q MEMS capacitors and inductors
Rais-Zadeh, MinaYear:
2011
Language:
english
Pages:
4
DOI:
10.1109/sirf.2011.5719335
File:
PDF, 441 KB
english, 2011