[IEEE 2009 International Conference on Mechatronics and Automation (ICMA) - Changchun, China (2009.08.9-2009.08.12)] 2009 International Conference on Mechatronics and Automation - Magnetic levitation as a micromanipulation technique for MEMS
Elbuken, Caglar, Khamesee, M. Behrad, Yavuz, MustafaYear:
2009
Language:
english
Pages:
5
DOI:
10.1109/icma.2009.5246364
File:
PDF, 4.11 MB
english, 2009