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[IEEE 2012 IEEE International Interconnect Technology Conference - IITC - San Jose, CA, USA (2012.06.4-2012.06.6)] 2012 IEEE International Interconnect Technology Conference - How to address metallization and reliability challenges in today and tomorrows technology nodes?
Preusse, Axel, Hahn, Jens, Chowdhury, Tamjid, Hintze, Bernd, Liske, Romy, Nopper, Markus, Stoeckgen, UweYear:
2012
Language:
english
Pages:
1
DOI:
10.1109/iitc.2012.6251655
File:
PDF, 86 KB
english, 2012