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Properties of LiNbO3 Thin Film Deposited by Chemical Vapor Deposition and Frequency Characteristics of Film Bulk Acoustic Wave Resonator
Kadota, Michio, Suzuki, Yusuke, Ito, YoshihiroVolume:
50
Year:
2011
Language:
english
DOI:
10.1143/jjap.50.07hd10
File:
PDF, 1.11 MB
english, 2011