Electrical transport, optical properties, and structure of...

Electrical transport, optical properties, and structure of TiN films synthesized by low‐energy ion assisted deposition

Savvides, N., Window, B.
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Volume:
64
Year:
1988
Language:
english
DOI:
10.1063/1.341468
File:
PDF, 1.42 MB
english, 1988
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