Device-Level Vacuum Packaging for RF MEMS
Shahriar Rahman, M., Chitteboyina, M.M., Butler, D.P., Çelik-Butler, Z., Pacheco, S.P., McBean, R.V.Volume:
19
Year:
2010
Language:
english
Pages:
919
DOI:
10.1109/jmems.2010.2055541
File:
PDF, 834 KB
english, 2010