[IEEE 2009 International Semiconductor Device Research...

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[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Optimization and characterization of RF MEMS inductors fabricated in PolyMUMPS technology

Moreno-Villarreal, M.G., Mireles Jr.-Garcia, J., Ambrosio-Lazaro, R.C.
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Year:
2009
Language:
english
Pages:
2
DOI:
10.1109/isdrs.2009.5378341
File:
PDF, 120 KB
english, 2009
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