![](/img/cover-not-exists.png)
[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Optimization and characterization of RF MEMS inductors fabricated in PolyMUMPS technology
Moreno-Villarreal, M.G., Mireles Jr.-Garcia, J., Ambrosio-Lazaro, R.C.Year:
2009
Language:
english
Pages:
2
DOI:
10.1109/isdrs.2009.5378341
File:
PDF, 120 KB
english, 2009