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Electrostatic charge and field sensors based on micromechanical resonators
Riehl, P.S., Scott, K.L., Muller, R.S., Howe, R.T., Yasaitis, J.A.Volume:
12
Year:
2003
Language:
english
Pages:
590
DOI:
10.1109/jmems.2003.818066
File:
PDF, 1.10 MB
english, 2003