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Low Temperature Synthesis of Diamond Films with Electron Cyclotron Resonance Plasma Chemical Vapor Deposition
Mantei, Thomas D., Ring, Zoltan, Schweizer, Mark, Tlali, Spirit, Jackson, Howard E.Volume:
35
Year:
1996
Pages:
4
DOI:
10.1143/jjap.35.2516
File:
PDF, 850 KB
1996