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[IEEE 2008 IEEE 35th International Conference on Plasma Science (ICOPS) - Karlsruhe, Germany (2008.06.15-2008.06.19)] 2008 IEEE 35th International Conference on Plasma Science - A microstrip-line microwave interferometer for monitoring of plasma density of processing plasmas
Hsieh, C. H., Liang, Y. W., Lin, C., Keh-chyang Leou,Year:
2008
Language:
english
Pages:
1
DOI:
10.1109/plasma.2008.4590662
File:
PDF, 62 KB
english, 2008