Angular and energy dependence of the ion beam oxidation of...

Surface and Interface Analysis 1999 / 02 Vol. 27; Iss. 2

Angular and energy dependence of the ion beam oxidation of Si using oxygen ions from a duoplasmatron source

Deenapanray, Prakash N. K., Petravic, Mladen
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Volume:
27
Language:
english
Pages:
6
Journal:
Surface and Interface Analysis
DOI:
10.1002/(sici)1096-9918(199902)27:23.0.co;2-v
Date:
February, 1999
File:
PDF, 175 KB
english, 1999
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