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Thermal dehydrogenation of amorphous silicon deposited on c-Si: Effect of the substrate temperature during deposition
A. de Calheiros Velozo, G. Lavareda, C. Nunes de Carvalho, A. AmaralVolume:
aop
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/pssc.201200194
File:
PDF, 347 KB
english, 2012