On the segregation of Ca at SiO2/Si interface during oxygen...

Surface and Interface Analysis 2000 / 02 Vol. 29; Iss. 2

On the segregation of Ca at SiO2/Si interface during oxygen ion bombardment

Deenapanray, Prakash N. K., Petravic, Mladen
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Volume:
29
Language:
english
Pages:
8
Journal:
Surface and Interface Analysis
DOI:
10.1002/(sici)1096-9918(200002)29:23.0.co;2-b
Date:
February, 2000
File:
PDF, 128 KB
english, 2000
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