16.P.05 Aerosol-assisted chemical vapor deposition of copper
C. Roger, T.S. Corbitt, T.T. Kodas, M.J. Hampden-SmithVolume:
25
Year:
1994
Language:
english
Pages:
223
DOI:
10.1016/0021-8502(94)90341-7
File:
PDF, 168 KB
english, 1994