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Transport of submicron particles from a leak to a perpendicular surface in a chamber at reduced pressure
F. Schmidt, H. Fissan, K.G. SchmidtVolume:
27
Year:
1996
Language:
english
Pages:
751
DOI:
10.1016/0021-8502(96)00023-7
File:
PDF, 557 KB
english, 1996