Deposition condition of hydrogenated amorphous carbon films...

Journal of Non-Crystalline Solids 1987 Vol. 97-98; Iss. part-P2

Deposition condition of hydrogenated amorphous carbon films having quasi-one dimensional structures

Shoji Nitta, Shuichi Nonomura, Ryouichi Takagi, Nobuaki Kojima, Akihiro Yasuda
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Volume:
97-98
Year:
1987
Language:
english
Pages:
1455
DOI:
10.1016/0022-3093(87)90348-6
File:
PDF, 161 KB
english, 1987
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