Aluminum-enhanced destruction of a-Si:H/a-SiC:H multilayer...

Journal of Non-Crystalline Solids 1988 Vol. 105; Iss. 3

Aluminum-enhanced destruction of a-Si:H/a-SiC:H multilayer structures

Kazuhiko Shinohara, Fuminori Moriyama, Katsuaki Natori, Hiroshi Kukimoto
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Volume:
105
Year:
1988
Language:
english
Pages:
295
DOI:
10.1016/0022-3093(88)90321-3
File:
PDF, 216 KB
english, 1988
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