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Deposition and characterisation of a-Si: H films prepared by reactive ion beam sputtering
Mohan Krishan Bhan, Subhash C. Kashyap, L.K. MalhotraVolume:
101
Year:
1988
Language:
english
Pages:
117
DOI:
10.1016/0022-3093(88)90375-4
File:
PDF, 389 KB
english, 1988