Ar+ laser crystallization of a-Si:H film for active layer...

Journal of Non-Crystalline Solids 1989 Vol. 115; Iss. 1-3

Ar+ laser crystallization of a-Si:H film for active layer of TFT

Xinfan Huang, Zhifeng Li, Qing Gu, Ximao Boa, Kunji Chen
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Volume:
115
Year:
1989
Language:
english
Pages:
81
DOI:
10.1016/0022-3093(89)90366-9
File:
PDF, 195 KB
english, 1989
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