High rate deposition of a-Si:H films for optoelectronic...

Journal of Non-Crystalline Solids 1989 Vol. 115; Iss. 1-3

High rate deposition of a-Si:H films for optoelectronic detectors by VHF-GD

B. Leutz, H. Keppner, V. Viret, D. Fischer, E. Sauvain, A. Shah
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Volume:
115
Year:
1989
Language:
english
Pages:
96
DOI:
10.1016/0022-3093(89)90371-2
File:
PDF, 216 KB
english, 1989
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