Deposition of silicon by decomposition of silane via...

Journal of Non-Crystalline Solids 1989 Vol. 115; Iss. 1-3

Deposition of silicon by decomposition of silane via hydrogen abstraction

M.S. Brandt, J. Chrysostomides, S. Koynov, V. Petrova-Koch
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Volume:
115
Year:
1989
Language:
english
Pages:
108
DOI:
10.1016/0022-3093(89)90375-x
File:
PDF, 175 KB
english, 1989
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