Low temperature fabrication of poly-Si TFT by laser induced...

Journal of Non-Crystalline Solids 1989 Vol. 115; Iss. 1-3

Low temperature fabrication of poly-Si TFT by laser induced crystallization of a-Si

K. Masumo, M. Kunigita, S. Takafuji, M. Yuki
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Volume:
115
Year:
1989
Language:
english
Pages:
150
DOI:
10.1016/0022-3093(89)90388-8
File:
PDF, 166 KB
english, 1989
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