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High-efficiency amorphous silicon p-i-n solar cells deposited from disilane at rates up to 2 nm/s using VHF discharges
Hood Chatham, Pawan Bhat, Amy Benson, Cheryl MatovichVolume:
115
Year:
1989
Language:
english
Pages:
204
DOI:
10.1016/0022-3093(89)90404-3
File:
PDF, 203 KB
english, 1989