Comparative study of the incorporation scheme of H in a-Si:H alloyed with C, N and O
Minoru Kumeda, Satoko Nakanishi, Tatsuo ShimizuVolume:
114
Year:
1989
Language:
english
Pages:
519
DOI:
10.1016/0022-3093(89)90635-2
File:
PDF, 196 KB
english, 1989