Annealing dependence of PDS of a-Si:H/a-SiNx:H multilayers

Journal of Non-Crystalline Solids 1989 Vol. 114; Iss. part-P2

Annealing dependence of PDS of a-Si:H/a-SiNx:H multilayers

Shulin Wang, Hellmut Fritzsche, Ruguang Cheng
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Volume:
114
Year:
1989
Language:
english
Pages:
744
DOI:
10.1016/0022-3093(89)90706-0
File:
PDF, 146 KB
english, 1989
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