Hydrogen dilution effects on properties of ECR plasma deposited a-Ge:H
Takeshi Aoki, Seiichi Kato, Yasuo Nishikawa, Masataka HiroseVolume:
114
Year:
1989
Language:
english
Pages:
801
DOI:
10.1016/0022-3093(89)90724-2
File:
PDF, 182 KB
english, 1989