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On the formation of silicon oxynitride by ion implantation in fused silica
A Carnera, P Mazzoldi, A Boscolo-Boscoletto, F Caccavale, R Bertoncello, G Granozzi, I Spagnol, G BattaglinVolume:
125
Year:
1990
Language:
english
Pages:
302
DOI:
10.1016/0022-3093(90)90861-f
File:
PDF, 658 KB
english, 1990