Influence of higher deposition temperature on a-Si:H material properties, powder formation and light-induced degradation, using the VHF (70 MHz) glow discharge technique
U. Kroll, J. Meier, M. Goetz, A. Howling, J.-L. Dorier, J. Dutta, A. Shah, Ch. HollensteinVolume:
164-166
Year:
1993
Language:
english
Pages:
63
DOI:
10.1016/0022-3093(93)90491-f
File:
PDF, 305 KB
english, 1993