Hydrogenated amorphous silicon films prepared from trisilane by windowless hydrogen discharge lamp
Akira Yoshida, Shinji Ikeda, Hiroshi TsuchimotoVolume:
164-166
Year:
1993
Language:
english
Pages:
99
DOI:
10.1016/0022-3093(93)90500-w
File:
PDF, 203 KB
english, 1993