The effects of Ar and He dilution of silane plasmas on the microstructure of a-Si:H detected by small-angle X-ray scattering
S.J. Jones, Y. Chen, D.L. Williamson, U. Kroll, P. Roca i CabarrocasVolume:
164-166
Year:
1993
Language:
english
Pages:
135
DOI:
10.1016/0022-3093(93)90509-v
File:
PDF, 302 KB
english, 1993