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Fabrication of high performance APCVD a-Si TFT using ion doping
Byung Chul Ahn, Jeong Hyun Kim, Dong Gil Kim, Byeong Yeon Moon, Kyung Ha Lee, Soon Sung Yoo, Min Koo Han, Jin JangVolume:
164-166
Year:
1993
Language:
english
Pages:
763
DOI:
10.1016/0022-3093(93)91108-f
File:
PDF, 252 KB
english, 1993