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Optical contrast formation in a-Si1−xCx:H films by ion implantation
T. Tsvetkova, N. Tzenov, M. Tzolov, D. Dimova-Malinovska, G. Adriaenssens, H. Pattyn, W. LauwerensVolume:
164-166
Year:
1993
Language:
english
Pages:
901
DOI:
10.1016/0022-3093(93)91142-p
File:
PDF, 291 KB
english, 1993