![](/img/cover-not-exists.png)
Structural and bonding properties of amorphous silicon nitride films
S. Hasegawa, T. Inokuma, Y. KurataVolume:
187
Year:
1995
Language:
english
Pages:
287
DOI:
10.1016/0022-3093(95)00150-6
File:
PDF, 622 KB
english, 1995