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Nuclear magnetic resonance studies of amorphous deuterated silicon nitride thin films
P. Santos-Filho, G. Stevens, G. Lucovsky, T. Cull, P. Fedders, D. Leopold, R. NorbergVolume:
198-200
Year:
1996
Language:
english
Pages:
81
DOI:
10.1016/0022-3093(95)00662-1
File:
PDF, 405 KB
english, 1996