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Optical and luminescence properties of polymer-like a-C:H films deposited in a dual-mode PECVD reactor
J.E. Bourée, C. Godet, B. Drévillon, R. Etemadi, T. Heitz, J. Cernogora, J.L. FaveVolume:
198-200
Year:
1996
Language:
english
Pages:
628
DOI:
10.1016/0022-3093(95)00776-8
File:
PDF, 321 KB
english, 1996