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Characteristics of the hot-wire CVD reactor on a-Si:H deposition
Naoto Tsuji, Tomoo Akiyama, Hiroshi KomiyamaVolume:
198-200
Year:
1996
Language:
english
Pages:
1058
DOI:
10.1016/0022-3093(96)00040-3
File:
PDF, 255 KB
english, 1996