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The effect of hydrogen dilution on the aminosilane plasma regime used to deposit nitrogen-rich amorphous silicon nitride
Darren Murley, Ian French, Steven Deane, Roderick GibsonVolume:
198-200
Year:
1996
Language:
english
Pages:
1063
DOI:
10.1016/0022-3093(96)00041-5
File:
PDF, 324 KB
english, 1996